000			00759nam a22002177a 4500
999			_c15088 _d15088
008			210519b ||||| |||| 00| 0 eng d
020			_a9780470083017
037			_bPurchase
040			_aLOC CIP _cMMU _dDaniel
050			_aTK7874 _b .H794 2008
100			_aHsu, Tai-Ran.
245			_aMEMS and microsystems _b : design, manufacture, and nanoscale engineering / _c Tai-Ran Hsu
250			_a2ed
260			_aHoboken, N.J. : _bJohn Wiley, _c2008.
300			_a xxv, 550 p. : _bill. ; 25 cm.
521			_aIncludes bibliographical references and index _bbook
650			_aMicroelectronics.
650			_aMicroelectromechanical systems.
650			_aMicroelectronic packaging.
942			_2lcc _cSH _e2nd ed. _hTK7874 _k .H794 _m2008