Hsu, Tai-Ran. <br/><br/>
MEMS and microsystems    : design, manufacture, and nanoscale engineering /  
Tai-Ran Hsu 
 - 2ed 
 - Hoboken, N.J. :  John Wiley,   2008. 
 - xxv, 550 p. :  ill. ; 25 cm. 
<br/><br/> Includes bibliographical references and index  book 
<br/><br/><label>ISBN: </label>9780470083017 
<br/><br/><label>Source: </label> Purchase 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics. <br/>Microelectromechanical systems.<br/>Microelectronic packaging.
<br/><br/><label>LC Class. No.: </label>TK7874   /  .H794  2008