Hsu, Tai-Ran.
MEMS and microsystems : design, manufacture, and nanoscale engineering / Tai-Ran Hsu - 2ed - Hoboken, N.J. : John Wiley, 2008. - xxv, 550 p. : ill. ; 25 cm.
Includes bibliographical references and index book
9780470083017
Purchase
Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.
TK7874 / .H794 2008
MEMS and microsystems : design, manufacture, and nanoscale engineering / Tai-Ran Hsu - 2ed - Hoboken, N.J. : John Wiley, 2008. - xxv, 550 p. : ill. ; 25 cm.
Includes bibliographical references and index book
9780470083017
Purchase
Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.
TK7874 / .H794 2008